Width measurement |
Display Resolution |
1 nm |
Repeatability |
5X : 0.4 μm, 10X : 0.2 μm, 20x : 0.05 μm, 50X : 0.04 μm, 100X : 0.02 μm |
Accuracy |
Measurement value +/- 1.5% |
Accuracy for stitched image |
10X : 24+0.5L μm, 20X : 15+0.5L μm, 50X : 9+0.5L μm, 100X : 7+0.5L μm (L: Stitching length [mm]) |