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CV Analyzer
The Keithley Model 590 CV Analyzer measures capacitance versus voltage (C-V) and capacitance versus time (C-t) characteristics of semiconductor devices. Unlike other capacitance measurement instruments, the Model 590 has been tailored to the requirements of semiconductor device testing.
High frequency (100kHz or 1MHz) CV measurements are commonly applied to test p-n or schottky junction and Metal-Insulator-Semiconductor (MIS) devices for device characterization and process control. CV results are highly correlated with performance parameters of functional devices such as FETs, memory cells, CCDs, and isolation structures.
Keithley 590 Features:
- 0.1fF sensitivity to test small devices
- Ranges up to 20nF (at 100kHz, using the Model 5904 adapter) to test large, leaky, or forward biased devices
- Test signal voltage of 15mV rms
- Choice of 1MHz frequency for compliance with existing test standards or 100kHz for improved resolution, range, and accuracy
- Selectable measurement rate (1 to 1000 readings per second) and filter to optimize speed/resolution trade-of
- Sophisticated correction for transmission line errors due to device connections
- Built-in test setup and correction value storage, analysis, and plotter control to minimize computer programming
- 100kHz, 1MHz, or 100kHz/1MHz test frequencies
- Measures capacitance (10fF-20nF) and conductance (0.1nS-1µS)
- Internal correction for errors due to cables, connections, and switching paths
- Built-in test setup and correction value storage, analysis, and plotter control to minimize computer programming
Keithley 590 Specifications:
| 100
kHz (4.5 Digits) |
| Range |
Resolution |
Accuracy
(1 Year)
18°-28°C ±(%rdg + counts) |
P-P Noise Filter On |
Temp. Coefficient 0°-18°C & 28°-50°C ±(%rdg + counts)/°C |
Shunt Capacitance Loading Effect ±(%rdg + counts) |
| 2
pF |
0.1
f F |
0.12%
+ (500 - G/GFS + 200) |
6
fF |
0.02%
+ (20 - G/GFS) |
0.1
% + (3 - G/GFS) |
| 2
µS |
0.1
nS |
0.12%
+ ( 50 - C/CFS + 200) |
4
nS |
0.02%
+ ( 7 - C/CFS) |
0.1
% + (3 - C/CFS) |
| 20
pF |
1
f F |
0.12%
+ (260 - G/GFS + 10) |
6
fF |
0.02%
+ (20 - G/GFS) |
0.1
% + (3 - G/GFS) |
| 20
µS |
1
nS |
0.12%
+ ( 22 - C/CFS + 10) |
4
nS |
0.02%
+ ( 7 - C/CFS) |
0.1
% + (3 - C/CFS) |
| 200
pF |
10
f F |
0.12%
+ (260 - G/GFS + 5) |
90
fF |
0.02%
+ (20 - G/GFS) |
0.1
% + (3 - G/GFS) |
| 200
µS |
10
nS |
0.12%
+ ( 22 - C/CFS + 5) |
60
nS |
0.02%
+ ( 7 - C/CFS) |
0.1
% + (7 - C/CFS) |
| 2
nF |
100
f F |
0.12%
+ (260 - G/GFS + 5) |
900
fF |
0.02%
+ (20 - G/GFS) |
0.02%
+ (2 - G/GFS) |
| 2
mS |
100
nS |
0.12%
+ ( 22 - C/CFS + 5) |
0.6
µS |
0.02%
+ ( 7 - C/CFS) |
0.02%
+ (3 - C/CFS) |
| 20
nF * |
1
pF |
0.25%
+ (260 - G/GFS + 5)3 |
9
pF |
0.1
% + (30 - G/GFS) |
0.02%
+ (2 - G/GFS) |
| 20
mS |
1
µS |
0.25%
+ ( 22 - C/CFS + 5) |
6
µS |
0.1
% + (10 - C/CFS) |
0.02%
+ (2 - C/CFS) |
Accuracy is max. limit for Q≥20;
typical for Q≤20.
*using Keithley 5904 20nF/20mS Input Adaptor, please consult your sales
representative for availability
| 1
MHz (4.5 Digits) |
| Range |
Resolution |
Accuracy
(1 Year)
18°-28°C ±(%rdg + counts) |
P-P Noise Filter On |
Temp. Coefficient 0°-18°C & 28°-50°C ±(%rdg + counts)/°C |
Shunt Capacitance Loading Effect ±(%rdg + counts) |
| 20
pF |
1
f F |
0.29%
+ (300 - G/GFS + 10) |
6
fF |
0.02%
+ (20 - G/GFS) |
0.5
% + (25 - G/GFS) |
| 200
µS |
10
nS |
0.29%
+ (120 - C/CFS + 10) |
40
nS |
0.02%
+ ( 8 - C/CFS) |
0.5
% + (10 - C/CFS) |
| 200
pF |
100
f F |
0.29%
+ (300 - G/GFS + 5) |
100
fF |
0.02%
+ (20 - G/GFS) |
0.35%
+ (40 - G/GFS) |
| 2
mS |
100
nS |
0.29%
+ (120 - C/CFS + 5) |
700
nS |
0.02%
+ ( 8 - C/CFS) |
0.35%
+ (16 - C/CFS) |
| 2
nF |
100
f F |
0.29%
+ (300 - G/GFS + 5) |
200
fF |
0.02%
+ (20 - G/GFS) |
0.35%
+ (40 - G/GFS) |
| 20
mS |
1
µS |
0.29%
+ (120 - C/CFS + 5) |
1
µS |
0.02%
+ ( 8 - C/CFS) |
0.35%
+ (16 - C/CFS) |
Accuracy is max. limit for Q≥20;
typical for Q≤20. |
