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Laser Position Transducer System
- Laser: Two frequency HeNe, 1.0 mW maximum output power
- Measurement Velocity (optics slew rate) with HP 5517B Laser Head
* Linear or Single Beam optics: 50.7 cm/s (20"/s)
* Plane or Differential optics: 25.3 cm/s (10"/s)
- Number of Measurement Axes: up to six, depending on optical layout
- Output: 32-bit parallel position and position error output updated at 1.9 - 2.4
MHz (with HP 5517B). HP-IB interface to controller, input (destination and commands)
at 75 - 350 Hz dependent on data format; output (position and status) at 80 - 1500 Hz,
dependent on software and configuration
System Components
- Laser Heads - HP 5517B Laser Head
- Optics:
* HP 10716A High Resolution Interferometer extends the resolution of this system to
2.5 nm
* HP 10717A Wavelength Tracker
* HP 10715A Differential Interferometer
* HP 10706B High Stability Plane Mirror Interferometer
* HP 10702A Linear Interferometer
* HP 10703A Linear Retroreflector
* HP 10705A Single Beam Interferometer
* HP 10704A Single Beam Retroreflector
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