Models |
Tip radius |
35
Tip radius 5 μm |
35
Tip radius 2 μm |
40
Tip radius 5 μm |
40
Tip radius 2 μm |
45
Tip radius 5 μm |
Measurement range |
Z direction |
-210 to +160 μm |
-210 to +160 μm |
-210 to +160 μm |
210 to +160 μm |
210 to +160 μm |
Drive axis |
X direction 16 mm |
X direction 16 mm |
X direction 16 mm |
X direction 16 mm |
Y direction 16 mm |
Analysis item |
Parameter profile curve |
Pt, Rmax, Rz, Rk, Rpk, Rvk, Mr1, Mr2, Vo, K, tp |
Roughness curve |
Ra, Rq, Rz, Rv, Rc, Rt, RSm, RΔq, Rsk, Rku, Rmr(c), Rmr, Rδc, Rz94, R3z, RΔa, Ry, Sm, S, tp, PC, RPc JIS, RPc ISO, RPc EN, Pc, PPI, Rp, Rmax, Mr1, Mr2, Rpk, Rvk, Rk, Vo, K, A1, A2, Rpm, Δa, Δq, Htp |
Motif |
R, Rx, AR, W, Wx, AW, Rke, Rpke, Rvke, NCRX, NR, CPM, SR, SAR, Wte, NW, SAW, SW, Mr1e, Mr2e, Vo, K |
Tracing driver |
Evaluation length |
0.2 to 16 mm |
0.2 to 16 mm |
0.2 to 16 mm |
0.2 to 16 mm |
0.2 mm to 4.0 mm |
Measurement speed |
0.5, 0.6, 0.75, 1.0 mm/s |
0.5, 0.6, 0.75, 1.0 mm/s |
0.5, 0.6, 0.75, 1.0 mm/s |
0.5, 0.6, 0.75, 1.0 mm/s |
0.6 mm/s |
Pickup |
Z direction resolution |
0.0007 μm/-210 to +160 μm |
0.0007 μm/-210 to +160 μm |
0.0007 μm/-210 to +160 μm |
0.0007 μm/-210 to +160 μm |
0.0007 μm/-210 to +160 μm |
Measurement force |
4 mN |
0.75 mN |
4 mN |
0.75 mN |
4 mN |
Filter |
Cutoff value λc
λs |
0.08, 0.25, 0.8, 2.5 mm
None, 2.5, 8 μm |