Keithley 590 Programmable Current Source

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Keithley 590 Programmable Current Source

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SKU: KEIT-590-100K-1M

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The Keithley Model 590 CV Analyzer measures capacitance versus voltage (C-V) and capacitance versus time (C-t) characteristics of semiconductor devices. Unlike other capacitance measurement instruments, the Model 590 has been tailored to the requirements of semiconductor device testing.

High frequency (100kHz or 1MHz) CV measurements are commonly applied to test p-n or schottky junction and Metal-Insulator-Semiconductor (MIS) devices for device characterization and process control. CV results are highly correlated with performance parameters of functional devices such as FETs, memory cells, CCDs, and isolation structures.

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100 kHz (4.5 Digits)
Range	Resolution	Accuracy (1 Year) 18°-28°C ±(%rdg + counts)	P-P Noise Filter On	Temp. Coefficient 0°-18°C & 28°-50°C ±(%rdg + counts)/°C	Shunt Capacitance Loading Effect ±(%rdg + counts)
2 pF	0.1 f F	0.12% + (500 - G/GFS + 200)	6 fF	0.02% + (20 - G/GFS)	0.1 % + (3 - G/GFS)
2 µS	0.1 nS	0.12% + ( 50 - C/CFS + 200)	4 nS	0.02% + ( 7 - C/CFS)	0.1 % + (3 - C/CFS)
20 pF	1 f F	0.12% + (260 - G/GFS + 10)	6 fF	0.02% + (20 - G/GFS)	0.1 % + (3 - G/GFS)
20 µS	1 nS	0.12% + ( 22 - C/CFS + 10)	4 nS	0.02% + ( 7 - C/CFS)	0.1 % + (3 - C/CFS)
200 pF	10 f F	0.12% + (260 - G/GFS + 5)	90 fF	0.02% + (20 - G/GFS)	0.1 % + (3 - G/GFS)
200 µS	10 nS	0.12% + ( 22 - C/CFS + 5)	60 nS	0.02% + ( 7 - C/CFS)	0.1 % + (7 - C/CFS)
2 nF	100 f F	0.12% + (260 - G/GFS + 5)	900 fF	0.02% + (20 - G/GFS)	0.02% + (2 - G/GFS)
2 mS	100 nS	0.12% + ( 22 - C/CFS + 5)	0.6 µS	0.02% + ( 7 - C/CFS)	0.02% + (3 - C/CFS)
20 nF*	1 pF	0.25% + (260 - G/GFS + 5)3	9 pF	0.1 % + (30 - G/GFS)	0.02% + (2 - G/GFS)
20 mS	1 µS	0.25% + ( 22 - C/CFS + 5)	6 µS	0.1 % + (10 - C/CFS)	0.02% + (2 - C/CFS)