Keithley 590 Programmable Current Source

The Keithley Model 590 CV Analyzer measures capacitance versus voltage (C-V) and capacitance versus time (C-t) characteristics of semiconductor devices. Unlike other capacitance measurement instruments, the Model 590 has been tailored to the requirements of semiconductor device testing.

High frequency (100kHz or 1MHz) CV measurements are commonly applied to test p-n or schottky junction and Metal-Insulator-Semiconductor (MIS) devices for device characterization and process control. CV results are highly correlated with performance parameters of functional devices such as FETs, memory cells, CCDs, and isolation structures.