ISO Standards: ISO 14644 Series: Cleanroom Standards

ISO 14644 Standards were first formed from the US Federal Standard 209E Airborne Particulate Cleanliness Classes in Cleanrooms and Clean Zones. As cleanrooms became more sophisticated, the need for wider ranging standards was recognized. The need for a single standard for cleanroom classification and testing was long felt. This lead to the formation of ISO Technical Committee 209. The goal of ISO TC 209 was the "standardization of equipment, facilities, and operational methods for cleanrooms and associated controlled environments."

ISO 14644-1 Classification of air cleanliness by particle concentration ANSI Standard 2015 Covers the classification of air cleanliness in cleanrooms and associated controlled environments.
ISO 14644-2 Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration ANSI Standard 2015 Specifies requirements for monitoring and periodic testing of a cleanroom or clean zone to prove its continued compliance with ISO 14644-1.
ISO 14644-3 Test methods ANSI Standard 2005 Specifies test methods for designated classification of airborne particulate cleanliness for characterizing the performance of cleanrooms and clean zones.
ISO/DIS 14644-3 Test methods DIS December 2016 This new Draft International Standard updates "textbook" guidance that has been in use since 2005 and sets out appropriate test methods for measuring the performance of an installation, a cleanroom, or an associated controlled environment.
ISO 14644-4 Design, construction, and start-up ANSI Standard 2001 Specifies requirements for the design and construction of cleanroom installations.
ISO 14644-5 Operations ANSI Standard Aug. 2004 Specifies basic requirements for cleanroom operations.
ISO 14644-7 Separative devices (clean air hoods, gloveboxes, isolators, minienvironments) ANSI Standard Nov. 2004 Specifies the minimum requirements for the design, construction, installation, testing and approval of separative devices.
ISO 14644-8 Classification of air cleanliness by chemical concentration (ACC) ANSI Standard 2013 Covers the classification of airborne molecular contamination (AMC) in cleanrooms and associated controlled environments.
ISO 14644-9 Classification of surface particle cleanliness ANSI Standard 2012 Establishes the classification of cleanliness levels on solid surfaces by particle concentration in cleanrooms and associated controlled environments.
ISO 14644-10 Classification of surface cleanliness by chemical concentrations Standard 2013 Defines the classification system for cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements.
ISO/DIS 14644-12 Specifications for monitoring air cleanliness by nanoscale particle concentration DIS Oct. 2016 Covers the monitoring of air cleanliness by particles in terms of concentration of airborne nanoscale particles.
ISO/FDIS 14644-13 Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical classifications FDIS Feb. 2017 Addresses the cleaning to a specified degree on cleanroom surfaces, surfaces of equipment in a cleanroom and surfaces of materials in a cleanroom.
ISO 14644-14 Assessment of suitability for use of equipment by airborne particle concentration Standard 2016 Specifies a methodology to assess the suitability of equipment for use in cleanrooms and associated controlled environments.
ISO/DIS 14644-15 Assessment of suitability for use of equipment and materials by airborne chemical concentration DIS Apr. 2016 Provides requirements and guidance for assessing the chemical airborne cleanliness of equipment and materials which are foreseen to be used in cleanrooms and associated controlled environments.