ISO:

ISO 14644 Series: Cleanroom Standards

ISO 14644 Standards were first formed from the US Federal Standard 209E Airborne Particulate Cleanliness Classes in Cleanrooms and Clean Zones. As cleanrooms became more sophisticated, the need for wider ranging standards was recognized. The need for a single standard for cleanroom classification and testing was long felt. This lead to the formation of ISO Technical Committee 209. The goal of ISO TC 209 was the "standardization of equipment, facilities, and operational methods for cleanrooms and associated controlled environments."

DOCUMENT	TITLE	STATUS	DESCRIPTION
ISO 14644-1	Classification of air cleanliness by particle concentration	ANSI Standard 2015	Covers the classification of air cleanliness in cleanrooms and associated controlled environments.
ISO 14644-2	Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration	ANSI Standard 2015	Specifies requirements for monitoring and periodic testing of a cleanroom or clean zone to prove its continued compliance with ISO 14644-1.
ISO 14644-3	Test methods	ANSI Standard 2005	Specifies test methods for designated classification of airborne particulate cleanliness for characterizing the performance of cleanrooms and clean zones.
ISO/DIS 14644-3	Test methods	DIS December 2016	This new Draft International Standard updates "textbook" guidance that has been in use since 2005 and sets out appropriate test methods for measuring the performance of an installation, a cleanroom, or an associated controlled environment.
ISO 14644-4	Design, construction, and start-up	ANSI Standard 2001	Specifies requirements for the design and construction of cleanroom installations.
ISO 14644-5	Operations	ANSI Standard Aug. 2004	Specifies basic requirements for cleanroom operations.
ISO 14644-7	Separative devices (clean air hoods, gloveboxes, isolators, minienvironments)	ANSI Standard Nov. 2004	Specifies the minimum requirements for the design, construction, installation, testing and approval of separative devices.
ISO 14644-8	Classification of air cleanliness by chemical concentration (ACC)	ANSI Standard 2013	Covers the classification of airborne molecular contamination (AMC) in cleanrooms and associated controlled environments.
ISO 14644-9	Classification of surface particle cleanliness	ANSI Standard 2012	Establishes the classification of cleanliness levels on solid surfaces by particle concentration in cleanrooms and associated controlled environments.
ISO 14644-10	Classification of surface cleanliness by chemical concentrations	Standard 2013	Defines the classification system for cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements.
ISO/DIS 14644-12	Specifications for monitoring air cleanliness by nanoscale particle concentration	DIS Oct. 2016	Covers the monitoring of air cleanliness by particles in terms of concentration of airborne nanoscale particles.
ISO/FDIS 14644-13	Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical classifications	FDIS Feb. 2017	Addresses the cleaning to a specified degree on cleanroom surfaces, surfaces of equipment in a cleanroom and surfaces of materials in a cleanroom.
ISO 14644-14	Assessment of suitability for use of equipment by airborne particle concentration	Standard 2016	Specifies a methodology to assess the suitability of equipment for use in cleanrooms and associated controlled environments.
ISO/DIS 14644-15	Assessment of suitability for use of equipment and materials by airborne chemical concentration	DIS Apr. 2016	Provides requirements and guidance for assessing the chemical airborne cleanliness of equipment and materials which are foreseen to be used in cleanrooms and associated controlled environments.

Products Used in Testing:

Beckman Coulter MET ONE 3411 Air Particle Counter

Beckman Coulter Beckman Coulter MET ONE 3411

The Beckman Coulter MET ONE 3411 portable air particle counters are designed specifically for semiconductor cleanroom monitoring, process benchmarking, and particle troubleshooting applications. With industry-leading ISO 21501...

Particle Measuring Systems Particle Measuring Systems Lasair III Portable Particle Counter Series

The Particle Measuring Systems Lasair III Series consists of several portable particle counters. These devices set the standard for aerosol particle counters. The on-board Pulse Height Analyzer (PHA) ensures ISO 21501-4...

TSI TSI AeroTrak 9110 Portable Particle Counter

The TSI AeroTrak 9110 is a portable particle counter with high accuracy (down to 0.100 µm) thanks to patented HeNe (helium/neon) laser technology. The TSI 9110 can perform testing for Class 1 and Class 2 clean rooms...

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