Olympus LEXT OLS5000 3D Measuring Laser Microscope

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The Olympus LEXT OLS5000 3D Measuring Laser Microscope precisely measures shape and surface roughness at the submicron level. Data acquisition that's four times faster than their previous model delivers a significant boost to productivity. With the capability to make accurate 3D measurements on a wide range of sample types, the system delivers reliable data for quality assurance and process control. The Olympus LEXT OLS5000's 405 nm violet laser and dedicated high-NA objectives make it possible to capture fine patterns and defects that conventional optical microscopes, white-light interferometers, or red laser-based microscopes are unable to detect. The LEXT OLS5000 microscope's scanning algorithm delivers improved data quality and greater speed to reduce the scan time and streamline your workflow, resulting in better productivity. The system features automatic data capture, so difficult setting adjustments are no longer necessary. Even users with minimal training can still obtain accurate results.

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Specifications

Total magnification	54x -17,280x
Field of view	16um - 5,120 um
Optical system	Reflection-type confocal laser scanning laser microscope
Light receiving element: Laser	Photomultiplier (2ch)
Color	CMOS color camera
Maximum number of measuring points in a single measurement	4096 x 4096 pixel
Maximum number of measuring points	36 Mpixel
Maximum sample height	100 mm

Laser light source
Wavelength	405nm
Maximum output	0.95 nm
Laser class	Class 2 (IEC 60825-1:2007, IEC60825-1:2014)
Color Light source	White LED
Electrical power	240 W
Mass of microscope body	31 kg
Mass of control box	12 kg

Height measurement
Display Resolution	0.5 nm
Dynamic range	16 bits
Repeatability	5X：0.45μm, 10X：0.1μm, 20X : 0.03μm, 50X : 0.012μm, 100X : 0.012μm
Accuracy	0.15+L/100μm (L:Measuring length[μm])
Accuracy for stitched image	5.0+L/100 μm, 20X or higher : 1.0+L/100 μm (L: Stitching length [μm])
Measurement noise	1nm

Width measurement
Display Resolution	1 nm
Repeatability	5X : 0.4 μm, 10X : 0.2 μm, 20x : 0.05 μm, 50X : 0.04 μm, 100X : 0.02 μm
Accuracy	Measurement value +/- 1.5%
Accuracy for stitched image	10X : 24+0.5L μm, 20X : 15+0.5L μm, 50X : 9+0.5L μm, 100X : 7+0.5L μm (L: Stitching length [mm])

Objective Specifications
Series	Model	Numerical Aperture (NA)	Working Distance (WD) (mm)
UIS2 objective lens (10X)	MPLFN2.5x	0.08	10.7
UIS2 objective lens (10X)	MPLFN5x	0.15	20
LEXT dedicated objective lens (High performance type)	MPLFLN10xLEXT	0.3	10.4
LEXT dedicated objective lens (High performance type)	MPLAPON20xLEXT	0.6	1
	MPLAPON50xLEXT	0.95	0.35
	MPLAPON100xLEXT	0.95	0.35
LEXT dedicated objective lens (Long working distance type)	LMPLFLN20xLEXT	0.45	6.5
	LMPLFLN50xLEXT	0.6	5
	LMPLFLN100xLEXT	0.8	3.4
Super long working distance lens	SLMPLN20x	0.25	25
	SLMPLN50x	0.35	18
	SLMPLN100x	0.6	7.6
Long working distance for LCD lens	LCPLFLN20xLCD	0.45	83.-7.4
	LCPLFLN50xLCD	0.7	3.0-2.2
	LCPLFLN100xLCD	0.85	1.2-0.9

Olympus LEXT OLS5000 3D Measuring Laser Microscope

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