Inficon UL3000 Fab (PLUS) Helium Leak Detector (Dry)

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The Inficon UL3000 Fab (PLUS) Helium Leak Detector (Dry) is a leak tester designed to perform leak testing in semiconductor applications. Inficon UL3000 Fab (PLUS) Helium Leak Detectors operate at a minimum detectable leak rate for helium of < 5 x 10-12 mbar l/s using their robust vacuum system and at a rate of < 5 x 10-8 mbar l/s in sniffer mode. The UL3000's improved vacuum system with low maintenance vacuum pumps allows the detection of leaks starting from atmospheric pressure. A rugged mass spectrometer system ensures long running time and low maintenance costs. The HYDRO-S software eliminates the water vapor background and makes leak testing even faster. The UL3000 Fab PLUS also offers an improved sniffer capability via the SL3000, which reaches up to 10 m.