| X axis | 16.0 mm (.63inch) |
| Range | 360 μm (-200 μm ~ +160 μm) [14400 μinch (-7900 μinch to +6300 μinch)] |
Measuring
range Detector Range/
resolution | 360 μm / 0.02 μm (14400 μinch / .8 μinch) |
| 100 μm / 0.006 μm (4000 μinch / .2 μinch) |
| 25 μm / 0.002 μm (1000 μinch / .08 μinch) |
| Measuring speed | In the measurement: 0.25mm/s (.01inch/s), 0.5mm/s (.02inch/s), 0.75mm/s (.03inch/s), In the return: 1mm/s (.04inch/s) |