32 mm Stylus - range / resolution |
32 mm / 125 nm (1.26 in / 4.8 μin) |
20 mm Stylus - range / resolution |
20 mm / 76 nm (0.79 in / 3 μin) |
Parameters range / resolution |
40 µm (1600 µin) / 0.01 µm (0.4 µin) |
Parameters range / resolution |
199 µm (7800 µin) / 0.1 um (4 µin) |