| Test Principle |
Inductance type |
| Measurement Range |
400μm |
| Stylus tip Radius |
5μm/2μm |
| Stylus tip Material |
Diamond |
| Measuring force |
4mN/0.75 mN |
| Stylus tip Angle |
90°/60° |
| Radius of Skid curvature |
45mm |
| Maximum drive range |
19mm/0.748inch |
| Traversing speed |
Measuring： Cut off length = 0.08 mm Vt=0.25 mm/s
Cut off length = 0.25 mm Vt=0.25mm/s
Cut off length = 0.8 mm Vt=0.5 mm/s
Cut off length=2.5mm Vt=1mm/s
Returning V=1mm/s |
| Accuracy |
Less than or equal to ±10% |
| Repeatability |
≤6% |
| Cut-Off Length |
0.08mm，0.25mm，0.8mm，2.5mm selectable |
| Evaluation Length |
(1~5 )L selectable |
|
| Measuring rang and resolution |
Measuring Range |
Resolution |
| Automatic |
0.001μm 0.008μm |
| ±50μm |
0.001μm |
| ±400μm |
0.008μm |
| Power |
Built-in Li battery |
| Power adapter |
Input: 100 V～240VAC，50/60Hz Output: 9V, 3A |
| Working environment |
Temperature: 0℃~40℃ Humidity: < 90% RH |
Storage and transport
environment |
Temperature: - 40℃ ~ 60℃ Humidity: < 90% RH |
| Dimensions |
155.4×75×56mm |
| Weight |
Approximately 760g |