| Roughness parameters |
Ra, Rz, Rq (Rms), Rt, Rs, Rsm, Rmax, Rpc, Rmr |
| Display resolutions |
0.01 µm /+/ -20 µm, 0.02 µm /+/ -40 µm, 0.04 µm /+/ -80 µm |
| Measuring accuracy |
≤±10% |
| Repeatability |
Less than or equal to 6% |
| Measuring range |
Ra, Rq: 0.01-40 µm; Rz,Rt, Rm: 0.02-160 µm |
| Maximum drive range |
0.7 in. (17.5mm) |
| Cut-off lengths |
0.009/0.03/0.09 in. (0.25/0.8/2.5mm) |
| Tracing speeds |
Speed 1mm/s (sampling length 2.5mm), speed 0.5mm/s (sampling length 0.8mm), speed 0.135mm/s (sampling length 0.25mm) |
| Pick up force |
<4mN |