| Surface Finish Parameters |
| Primary parameters |
DFTF, LSLP Ave, LSLP Max, Pa, Pc, PCf, PCl, PCr, Pda, Pdc, Pdq, PHSC, Pku, Pln, PLo, Plq, Pmr, Pmr(C), Pp, PPc, Pq, PS, Psk, PSm, Pt, Pv, PVo, Pz, Pz(JIS) |
| Roughness parameters |
R3y, R3z, Ra, Rc, RCf, RCl, RCr, Rda, Rdc, Rdq, RHSC, Rku, Rln, RLo, Rlq, Rmr, Rmr(C), Rp, Rp1max, Rpc, Rq, RS, Rsk, RSm, Rt, Rv, Rv1max, RVo, Rz, Rz(DIN), Rz(JIS), Rz(n), Rz1max |
| Waviness parameters |
Wa, Wc, WCf, WCl, WCr, Wda, Wdc, Wdq, WHSC, Wku, Wln, WLo, Wlq, Wmr, Wmr(C), Wp, WPc, Wq, WS, Wsk, WSm, Wt, Wv, WVo, Wz |
| Rk paramters and Rk curve |
A1, A2, APH, AVH, CV, Mr1, Mr2, Rk, Rpk, Rvk, Rvk/Rk |
| R & W parameters |
AR, AW, Pt, R, Rke, Rn, Rpke, Rvke, Rx, Sar, Saw, Sr, Sw, W, Wn, Wte, Wx |
| Dominant wavelength |
WD1c, WD1Sm, WD1t, WD2c, WD2Sm, WD2t, WDSmMax, WDSmMin |
| System Performance |
| Calibration Pt |
< 0.25 µm (10 µin) |
| System noise - Rq |
< 6 nm (0.24 µin) |
| Radius measurement uncertainty |
0.1 - 22mm (0.004 - 0.87in) - 1% to 0.015% of nominal
22 - 1000mm (0.87 - 39.4in) - 0.015% to 0.1% of nominal |
| Inclination measurement uncertainty |
0.5 arc minute (±35° Maximum Range) |
| Horizontal Performance |
| Traverse length – X max / min |
60 mm / 0.1 mm (2.4 in / 0.004 in)
120 mm / 0.1 mm (4.7 in / 0.004 in)
200 mm / 0.1 mm (7.9 in / 0.004 in) |
| Traverse speeds |
13 mm/s (0.51 in/s) max |
| Measuring speed |
0.25 mm/s, 0.5 mm/s, 1 mm/s & 2 mm/s (0.01 in/s, 0.02 in/s, 0.04 in/s & 0.08 in/s) |
| Minimum data sampling interval in X |
0.125 µm (5 µin) |
| Straightness accuracy (Pt) |
0.15 µm (5.9 µin)
0.18 µm (7.1 µin) |
| X axis indication accuracy |
(1 + 0.02 L) µm |
| Vertical Performance |
| Nominal measuring range (Z) |
1 mm Gauge Range
|
2 mm Gauge Range |
5 mm Gauge Range |
| Range 1 |
1 mm (0.04 in) |
2 mm (0.08 in) |
5 mm (0.20 in) |
| Range 2 |
0.2 mm (0.008 in) |
1 mm (0.04 in) |
2.5 mm (0.10 in) |
| Range 3 |
0.04 mm (0.002 in) |
0.2 mm (0.008 in) |
0.5 mm (0.02 in) |
| Range 4 |
Not applicable |
0.04 mm (0.002 in) |
0.1 mm (0.004 in) |
| Resolution (Z) |
| Range 1 |
4 nm (0.16 µin) |
8 nm (0.32 µin) |
20 nm (0.79 µin) |
| Range 2 |
0.8 nm (0.03 µin) |
4 nm (0.16 µin) |
10 nm (0.39 µin) |
| Range 3 |
0.16 nm (0.006 µin) |
0.8 nm (0.03 µin) |
2 nm (0.079 µin) |
| Range 4 |
Not applicable |
0.16 nm (0.006 µin) |
0.4 nm (0.016 µin) |
| Range to resolution |
262144 : 1 |
| Stylus arm length, tip size, force |
60 mm stylus 2 µm radius conisphere diamond, 1mN Force |
120 mm stylus 2 µm radius conisphere diamond, 1mN Force |
| Z axis non-linearity (Z = gauge displacement) |
Resolution + (0.05 Z[mm])µm (Resolution + (50 Z[inches])µin) after calibration |
| Repeatability of Z axis indication |
Repeatability of Z axis indication
Curved Surface 0.05um (2.0uin)1 |
Flat Surface 0.10um (3.9uin)
Curved Surface 0.10um (3.9uin)1 |