| Measurement Parameters |
Ra, Rz/Ry (JIS), Rq, Rt/Rmax, Rp, Rv, R3z, R3y, Rz (JIS), Rs, Rsk, Rku, Rsm, Rmr |
| Measuring Range |
Ra, Rq: 0.005 … 16 μm
Rz, R3z, Ry, Rt, Rp, Rm: 0.02 … 160 μm
Sk: 0 … 100 % S, Sm: 1 mm
Tp: 0 … 100 % |
| Resolution |
0.01 μm in the range of ±20 μm
0.02 μm in the range of ±40 μm
0.04 μm in the range of ±80 μm |
| Traversing Length |
17.5 mm |
| Sampling Cut-off |
0.25, 0.8, 2.5 mm |
| Measuring Length |
ln = lr * n
n = 1 … 5 |
| Force |
< 4 mN |
| Traversing Speed |
lr = 0.25 mm: Vt = 0.135 mm/s
lr = 0.8 mm: Vt = 0.5 mm/s
lr = 2.5 mm: Vt = 1 mm/s
Return: 1 mm/s |
| Accuracy |
± 10 % |
| Repeatability |
± 6 % |