Mass flow controller |
Accuracy: from 10 - 100% of full scale flow
Concentration: ±1.0%
Flow: ±1.0%
Repeatability ±0.05% |
Ozone generator |
Concentration range: 0.02 - 0.5 ppm at 5 – 10 slpm
Optional ranges: low ozone – 2 ppb; 0.05 - 1 ppm at 5 – 10 slpm |
Operating pressures at inlets |
Minimum: 15 psig (1.03 bar)
Nominal: 25 psig (1.72 bar)
Maximum: 30 psig (2.07 bar) |
Operating temperature |
32° - 122° F (0° - 50° C) |
Weight |
27 lb. (12.25 kg) |
Dimensions
(W x H x D) |
17 x 7 x 15 in (43.8 x 17.78 x 38.1 cm) |
Power |
Standard: 100 VAC to 250 VAC, (50/60 Hz)
Current: 2 Amps (maximum) |