| Test Voltages: | 500 V, 1000 V, 2500 V, 5000 V, 10000 V |
| Accuracy (23°C) | ±5% to 2 TΩ, ±20% to 20 TΩ |
| Capacitance Range (above 500 V): | 10 nF to 25 μF (dependent on measurement voltage) |
| Capacitance Accuracy (23°C): | ±10% ±5 nF |
| Voltage Output Accuracy (>200 V, 0 °C to 30 °C): | +4%, -0%, ±10 V nominal test voltage at 1 GΩ |
| Current measurement range: | 0.01 nA to 6 mA |
| Current measurement accuracy (23 °C): | ±5% ±0.2 nA at all voltages |