Classification of air cleanliness by particle concentration
|ANSI Standard 2015
||Covers the classification of air cleanliness in cleanrooms and associated controlled environments.
||Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration
||ANSI Standard 2015
||Specifies requirements for monitoring and periodic testing of a cleanroom or clean zone to prove its continued compliance with ISO 14644-1.
||ANSI Standard 2005
||Specifies test methods for designated classification of airborne particulate cleanliness for characterizing the performance of cleanrooms and clean zones.
| ISO/DIS 14644-3
DIS December 2016
|This new Draft International Standard updates “textbook” guidance that has been in use since 2005 and sets out appropriate test methods for measuring the performance of an installation, a cleanroom, or an associated controlled environment.
||Design, construction, and start-up
||ANSI Standard 2001
||Specifies requirements for the design and construction of cleanroom installations.
||ANSI Standard Aug. 2004
||Specifies basic requirements for cleanroom operations.
||Separative devices (clean air hoods, gloveboxes, isolators, minienvironments)
||ANSI Standard Nov. 2004
||Specifies the minimum requirements for the design, construction, installation, testing and approval of separative devices.
||Classification of air cleanliness by chemical concentration (ACC)
||ANSI Standard 2013
||Covers the classification of airborne molecular contamination (AMC) in cleanrooms and associated controlled environments.
||Classification of surface particle cleanliness
||ANSI Standard 2012
||Establishes the classification of cleanliness levels on solid surfaces by particle concentration in cleanrooms and associated controlled environments.
||Classification of surface cleanliness by chemical concentrations
||Defines the classification system for cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements.
||Specifications for monitoring air cleanliness by nanoscale particle concentration
||DIS Oct. 2016
||Covers the monitoring of air cleanliness by particles in terms of concentration of airborne nanoscale particles.
||Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical classifications
||FDIS Feb. 2017
||Addresses the cleaning to a specified degree on cleanroom surfaces, surfaces of equipment in a cleanroom and surfaces of materials in a cleanroom.
||Assessment of suitability for use of equipment by airborne particle concentration
||Specifies a methodology to assess the suitability of equipment for use in cleanrooms and associated controlled environments.
Assessment of suitability for use of equipment and materials by airborne chemical concentration
|DIS Apr. 2016
Provides requirements and guidance for assessing the chemical airborne cleanliness of
equipment and materials which are foreseen to be used in cleanrooms and associated controlled environments.