ENI/E&I PL-2HF Plasmaloc RF Generator

ENI/E&I PL-2HF Plasmaloc RF Generator
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E&I (formerly ENI) PL-2HF
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Datasheet

The Plasmaloc 2-HF is a versatile source of high frequency energy suitable for generating a gas plasma in such applications as plasma etching, deposition, and sputtering.The unit is capable of producing up to 1400 watts of power into an extremely wide variety of paralleled plate reactor configurations.Impedance matching between the Plasmaloc 2-HF and the gas plasma is accomplished by a built-in variable tap transformer network.True average plasma power (load power) as well as the power leaving the generator (forward power) is accurately measured and displayed on the front panel meter (0 to 2000 watts). These power levels are converted to a calibrated 1.00 volt per kilowatt (±1% accuracy) and may be displayed digitally by connecting a 3 1/2 digit (1.999 volt full scale) panel meter or used by other circuitry in the reactor to monitor power levels.


Specifications:

 
Output Impedance Range 50-600 Ω
Output Power 400W
Frequency Range 90-460 kHz
AC Power 115V at 50-60 Hz
Output Connector Type N